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IMM-100 Thin Film Deposition Monitor

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  • 概述
  • 規(guī)格
  • 零件號(hào)
  • 附件
  • 耗材
  • 下載

功能

  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • EtherCAT communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant

典型應(yīng)用

  • OLED Applications

規(guī)格

類型 IMM-100
Measurement  
Sensor inputs 1
測(cè)量頻率范圍 6.0 to 4.5 MHz (fixed)
Reference frequency stability ±2 ppm 0-60°C
頻率分辨率 ±0.0035 Hz @ 6 MHz
Rate and thickness resolution 0.0042 ? (new crystal); 0.0076 ? (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0
Measurement interval 100 ms
Measurement technique ModeLock
Operation and Dimensions  
Input voltage 24 V (dc)
工作溫度 0 to 50°C (32 to 122°F)
Size 222.6 mm (8.76 in.) x 106.1 mm (4.18 in.) x 35.3 mm (1.39 in.)
Weight 0.48 kg (1.05 lbs.)
Communication type EtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches

零件號(hào)

IMM-100
零件號(hào) 明細(xì)
785-200-G1 MIU/M Unit
785-600-G1 IMM-100

附件

零件號(hào) 明細(xì)
Optional Power Supplies The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1 MPH 電源,80 - 250 VAC / 4 ft (1.2m) 美式插頭
961-021-G2 MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 美式插頭,帶 15 ft (4.5m) 延長(zhǎng)電纜
961-021-G3 MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 美式插頭,帶 30 ft (9m) 延長(zhǎng)電纜
961-021-G4 MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭
961-021-G5 MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭,帶有 15 ft (4.5m) 延長(zhǎng)電纜
961-021-G6 MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭,帶有 30 ft (9m) 延長(zhǎng)電纜
961-021-G7 Power Supply Kit IL 240V
961-021-G8 Power Supply Kit IL 4.5 M Extension
961-021-G9 Power Supply Kit IL 9.0 M Extension
961-021-G10 Power Supply Kit UK 240V
961-021-G11 Power Supply Kit UK 4.5 M Extension
961-021-G12 Power Supply Kit UK 9.0 M Extension
Optional Mounting Bracket
785-202-G1 Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1 Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
Optional Communications Cable
600-1190-P1 ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2 SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4 ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8 Cable, Ethernet Communication, 7.6 Meter
600-1190-P15 ETHERNET COMUNICATION CABLE 15.3 METER

耗材

名稱 說(shuō)明
石英監(jiān)控器晶體 石英監(jiān)控器晶體

手冊(cè)

  • IMM-100 Thin Film Deposition Monitor Operating Manual (English) |中文| |EN| |DE| |ES| |日文| |??|

三維步驟文件

  • 785-600-G1 - IMM-100 QCM Interface Unit |中文| |EN| |DE| |ES| |日文| |??|


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